INFICON UHV 可烘烤晶体传感器拥有经实践检验的可靠性和耐用性，提供超越当前市场上的任何传感器头的热稳定性。可烘烤传感器由 304 号不锈钢、钼、铬镍铁合金、镍和氧化铝材料制成，设计为可承受连续烘烤温度高达 450° C（仅适用于烘烤，实际沉积监控需要水流）。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。
功能
- 高温铜焊和焊接结构
- 烘烤温度高达 450° C
- 晶体闸（选件）
- 前装式晶体支架
- 易于安装
- CF40 馈入件
- 馈入件不需要铜焊或焊接
- 焊接为客户指定长度的传感器/馈入件组
零件号
规格
| 类型 | Bakeable Sensor w/ Shutter | Bakeable Sensor w/out Shutter | |
|---|---|---|---|
| 温度 | 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) | 450°C continuous (for bake only; water flow recommended for actual deposition monitoring) | |
| 传感器头部尺寸（外壳） | 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high | 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high) | |
| 晶体交换 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. | |
| 安装 | a) Standard—four #4-40 tapped holes on the back of the body b) Optional—right angle bracket; IPN 007-108 | Four #4-40 tapped holes on the back of the body | |
| 馈入件 | 2¾ in. ConFlat®, integral with sensor head Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius) | 2¾ in. ConFlat, integral with sensor head Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius) | |
| 实用工具 | 1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.) 2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa] 3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required | Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.) | |
| 材料 | |||
| 主体和支架 | 304 type stainless steel | 304 type stainless steel | |
| 弹簧 | Molybdenum and Inconel X-750 | Molybdenum and Inconel X-750 | |
| 水、空气和同轴管线 | 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax | ||
| 其他机械部件 | 18-8 or 304 stainless | 18-8 or 304 stainless | |
| 绝缘体 | >99% Al2O3 in vacuum; other high density ceramics used elsewhere | >99% Al2O3 in vacuum; other high density ceramics used elsewhere | |
| 电线 | 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) | 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) | |
| 铜焊 | Vacuum process high temperature Ni-Cr alloy | Vacuum process high temperature Ni-Cr alloy | |
| 晶体 | 0.550 in. (13.97 mm) diameter | 0.550 in. (13.97 mm) diamete | |
