自动晶体转换功能限度延长生产时间
INFICON Crystal 12 传感器与INFICON IC6 薄膜沉积控制器结合使用时，可自动更换其晶体，而无需中断过程。晶体不稳定或失效时，IC6 会立即向 Crystal 12传感器旋转传送带发送信号，要求其立即将新晶体旋转到位，从而实现持续沉积速率监控。为进一步最小化停工时间，可以将晶体预先加载到另一个可选旋转传送带上，这样，可以直接轻松快速地更换装有失效晶体的旋转传送带，从而限度缩短系统打开的时间。
功能
- 装有 12 颗晶体，可进行可靠的自动转换，从而限度延长过程运行时间
- 易于拆卸的旋转传送带允许快速更换所有 12 颗晶体
- 晶体转换由空气驱动完成（竞争产品是使用生热电机），因而晶体温度非常稳定
- 易于拆卸的前沉积罩保护晶体和旋转传送带上不会积存材料，从而限度减少拆卸整个传感器以进行维护的必要性
- 可选安装后套件允许用户根据公制硬件大小自行修改
零件号
规格
| 类型 | Crystal 12 Sensor | |
|---|---|---|
| 无水时的烘烤温度 | 130°C | |
| 最小水流时的工作等温环境温度 | 300° C | |
| 尺寸（外壳） | 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed | |
| 水管和空气管长度 | Standard 30 in. (762 mm) | |
| 晶体交换 | Front-loading | |
| 安装 | Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1). | |
| 重量 | 4.92 lb. (2.23 kg) | |
| 安装要求 | ||
| 馈入件 | Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1, or, Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1 | |
| 安装 | User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose. | |
| 空气和水连接 | User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.) | |
| 实用工具 | Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. | |
| 材料 | ||
| 板、材料罩、机械部件、主体和圆盘 | 304 type stainless steel | |
| 弹簧、电气触点 | Au plated Be-Cu, Au Plated 302 stainless steel | |
| 水管和空气管 | S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing | |
| 连接器 | Stainless steel | |
| 绝缘体 | Teflon, Peek® | |
| 电缆 | Teflon insulated copper plated steel | |
| 晶体 | 0.550 in. (13.97 mm) diameter | |
| 1 in. 螺栓和 Ultra-Torr（压缩接头）端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® | |
| 温度 | Operational environment to 300° C with water cooling or 165° C without | |
| 安装 | 1.015 in. ±0.010 in. diameter aperture | |
| CF 40 焊接式端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
| 温度 | Operational environment to 450° C with water cooling or 165° C without | |
| 安装 | Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. | |
