EPRO传感器PR9268/017-100+前置器
EPRO传感器PR9268/017-100+前置器
当PLC上电后，一直进行温度、压力、流量等运行参数的检测，这些检测主要在检测程序、故障程序和A/B组故障停机程序中完成。如果相关参数均无异常，则开机功能块子程序运行，启动压缩机。在开机过程中，同时进行温度判断。如果温度达到了设定值，则进入调节功能块子程序，停止开机功能块子程序，完成开机。根据温度的变化，调节功能块子程序控制压缩机的启停。变频器的控制则是通过调用加载程序和降载程序来实现。
Asyst 3200-1045-01
MKS MKS-1459C-
MKS 1459C-00500RM
MKS MKS-1459C
MKS 1459C-00500RM
AMAT 0020-40066
MKS 1459C-01000RM
AMAT 0021-12764 Upper Shield, 8" SIP-TA, 327234
Unit UFC-8565 Mass Flow Controller MFC, C2H4, 5L, AMAT 3030-11781
STEC LF-310A-EVD Liquid Flow Controller LFC TEB 0.5g/min AMAT 3030-05744
STEC LF-310A-EVD Liquid Flow Controller LFC TEB 0.5g/min AMAT 3030-05744
STEC LF-410A-EVD Liquid Mass Flow Meter, LFC, TEOS, AMAT 3030-06043
STEC LF-310A-EVD
Vicor VI-26F-CU
Weigh-tronix WI-125, Class III/IIIL Scaleload, w/ Interface 1210AF-1K
Fanwall HG410025-PM-R
Fanwall CMS-32H R Filtering Fan Controller, HG410010-L
Leybold AG 200.80.976
Opto 22 AD9T
Infinicon CDG100 Capacitance Diaphragm Gauge PG62 10 Torr FL-9496 362-033
Unit Instruments UFC-1100A
Novellus 71-332298-00 Kit, Ship Along, Install, Door Purge, 451210
Oil-Rite Corporation Liquid Level Gauge, 451209
Asyst End Effector, Robot, 4003-2104-01, 451208
Asyst End Effector, Robot, 4003-2104-01, w/ Brooks 3200-4426-04
CTI Cryogenics 8081271
AMAT 0010-76697
SensArray 482-05-0002
AMAT 0140-76224
WSP-009 PCB, 7R 319021, 451199
AMAT 0140-70173
AMAT 0140-76223
AMAT 0190-35763
CTI Cryogenics 39108059
Novellus CA-63-33209-00
Novellus CA-63-33200-00
STEC SEC-4400
Novellus 63-33202-00
Novellus 63-33498-00
Yaskawa CACR-SR03AB2ER
Omega DP25-S-AR
AMAT 0010-21751 Resonator
West Bond 7200A
Ecosys 6324-01 Kit, PM GS8, 451187
AMAT 3750-01014
Kalrez AS-568A O-Ring, K#121
Kalrez AS-568A O-Ring, K#120
Kalrez AS-568A O-Ring K#202
ABB S4N Circuit Breaker, SACES4, SACEPR211, AE03088627
Teach Pendant, Controller, Robot, 451177
MKS 153-1016K-24VDC
Entegris A192-81MLZ-0215
Swagelok SS-4-VCR-CP
Swagelok NI-4-VCR-2
AMAT 1220-01017 XMTR 2-Wire ORP 4-20MA-OUT
MKS LPV1-40-AK-CNVS
MKS 99N0878 Right Angle Valve, 72-428642
Veriflo 45800345 Isolation Valve, 945A0PLPNCHF111?VESP, 451169
Veriflo 45800345 Isolation Valve, 945A0PLPNCHF111?VESP, 451168
20176-00 Isolation Valve, Bellows, Pneumatic, 451167
Swagelok SS-4BK-V51-10
Ushio JCV120V-1200WC
11682-00 Isolation Valve, Bellows, Pneumatic, 451144
CP-40, KF40, Clamp, 451164
MKS HPS 100312703 Seal, Center Ring, NW25, AMAT 3700-01089
Brooks PRJ BM300290000
AMAT 0125-77072 IC113C
Tescom PV73A4K Valve, 451025
Tylan General CMLA-21S06
Mykrolis CMX2T1124
RF Plasma Products RFPP 23-07558-501 RF20
AMAT 8100 Oxide Etcher w/ Pump Power Rack, 8100E, AME-8100, 451142
Fuji Electric EL90P0 Earth Leakage Protective Relay, AMAT 1200-01148
Quartz Viewport, Circular, 3 1/4" Diameter, 402336
Quartz Viewport, Circular, 3 1/4" Diameter, 402335
LAM 795-099665-001 Gate Bonded Slit Valve Door, Chemraz, VAT 96073-R1
Horiba STEC LV-F50PO
MKS 1159B-02000RV-S
STEC SEC-4400MC
Unit Instruments UFC-1660
AMAT 8100L, 8100X, 8100
Kaijo FB-118A Wire Bonder, FB 118A, FB 118A, 451153
Kaijo FB-118A Wire Bonder, FB 118A, FB 118A, 451152
Kulicke & Soffa 780 Wafer Dicing Saw with Manual, K&S, 451151
AMAT 0140-00533
Schuetz Messtechnik MR-1 Surface Resistance Meter, 451149
Kulicke & Soffa 982-6
Chemical Cabinet Drum Storage Unit, with Exhaust, 451145
Chemical Safety Technology Chemical Pump Delivery System, Master Flex, 451100
AMAT 0100-18043
