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产品简介

GENTECU57seriessingle-stageregulatorsareaspringless,threadless,point-of-usetieddiaphragmdesignformodernsemiconductormanufacturers,equipmentmanufacturersandendusers

详细介绍

GENTEC U57 series single-stage regulators are a springless, threadless, point-of-use tied diaphragm design for modern semiconductor manufacturers, equipment manufacturers and end users. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

Features

316L and Hastelloy^® body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
No springs or threads are exposed to the wetted area
Standard fully internal electropolished
Designed for very low particle generation
Cleaned, assembled and packaged for high purity semiconductor applications
High-cycle life
99% Helium-leak tested

Materials of Construction

Wetted
Body		316L stainless steel, Hastelloy^®
Seat		PCTFE
Diaphragm		Elgiloy^®, Hastelloy^®
Poppet		316L stainless steel
Compression Member		316L stainless steel
Remaining Part		316L stainless steel
Non-wetted
Nut		316 stainless steel
Cap		nickel plated brass
Knob		ABS Plastic
Operating Conditions
Maximum Inlet Pressure		300 psig (20 barg)
Outlet Pressure		0-30 psig (2 barg)
Temperature		0°F to 140°F (-18°C to 60°C)
Functional Performance
Flow Capacity		Cv=0.054
Maximum Leak Rate:
Inboard Leakage		0.5 x 10^-9 atm cc/sec He
Outboard Leakage		1.0 x 10^-9 atm cc/sec He
Across Seat Leakage		1.0 x 10^-9atm cc/sec He
Proof Pressure		150% of maximum rated pressure
Burst Pressure		400% of maximum rated pressure
Surface Finish
Standard Ra (EP)		10 μin
Optional Ra (EP)		5 μin
Internal Volume		9.3cc

Dimensions

Flow Charts

型号参数：

Series	Body	Ports	Seat	Inlet Pressure	Outlet Pressure	Gauge	Inlet/Outlet Connections	Options
U57	SL: 316L	A: 2 port	K: PCTFE	G: 300psig	L: 0-30psig	P: with gauge	91: FSR(1/4"F)	E: 5 μin
	H: Hastelloy®	B: 3 port				W: without gauge	92: FSR(1/4"M)	I: Internal 1/4" FSR(F) gauge ports
		G: 4 port					41: 1/4" tube weld stub	T: Trim Hastelloy® internal
		J: 4 port