品牌：Attolight
产地：瑞士
型号：Säntis 300
The Säntis 300 system has been designed for fully automated control of 150, 200 and 300 mm wafers.
Attolight’s Quantitative CL-SEMs offer “No Compromise” large field fast scanning simultaneous acquisition of SEM image, hyperspectral CL maps, and optical spectra. Smaller diameter wafers, or miscellaneously shaped substrates are manually loaded on intermediary 300 mm susceptors subsequently handled automatically by the tool.
