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电阻真空计 INFICON Capacitance Diaphragm Gauge

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  • 公司名称安徽贝意克设备技术有限公司
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  • 更新时间2024/10/28 19:41:11
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安徽贝意克设备技术有限公司成立于2012年,隶属百思集团,其平行公司有百思新材料研究院有限公司、合肥莱德装备技术有限公司、天津百诺金科技有限公司、合肥欧莱迪光电技术有限公司、安徽贝意克智能科技有限公司。贝意克公司于2020年在合肥投资5亿元新建5万平米贝意克智能装备产业园。设有贝意克工程设计中心,贝意克工程技术中心,贝意克联合实验室等研发公共服务平台。贝意克主要从事实验室仪器设备的研发生产,主营各类型箱式炉、管式炉、CVD、PECVD、 ALD、 PVD磁控溅射、真空镀膜、薄膜制备、纳米材料制备装备、各种高精度真空箱以及各类非标定制,产品领域涉及科研、光电产业化、半导体、等高科技产业。公司致力于提供专业的设备、技术和服务,助力新材料研发。
真空计
ThisisaPiraniCapacitanceDiaphragmGauge(EQ-PGC-554)combinesthepatentedceramiccapacitancediaphragmsensortechnologywiththeadvantagesofaPiranigaugeinasingleproduct
电阻真空计 INFICON Capacitance Diaphragm Gauge 产品信息

  This is a Pirani Capacitance Diaphragm Gauge (EQ-PGC-554) combines the patented ceramic capacitance diaphragm sensor technology with the advantages of a Pirani gauge in a single product. In the measurement range between 10 mbar and atmosphere, the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement.

  With the need to factor gas type dependency into the pressure reading output being eliminated, risks of explosions in tube vessels or other chambers due to incorrect display of pressure AND/OR negligence of adjustment for gas types ARE GREATLY REDUCED.

Features

Designed and made by Switzerland-based INFICON

Gas-type independent above 10 mbar - allows safe venting with any gas mixture

High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

Fast atmospheric detection eliminates waiting time and shortens process cycle

Versatile mounting orientation provides engineering freedom in tool design

fully ceramic coated sensor unit for highly corrosive applications

Easy to exchange plug & play sensor element with onboard calibration data guarantees high reproducibility and low cost of ownership        

Power Connection

9 pins D-sub connector. 

Power Adapter

One 15 VDC power adapter is included and ready to use. Input voltage for the adapter is 110~240 V.

Measurement Range

3.8E-5 to 1125 Torr.

Accuracy

​5×10-4 … 1×10-3 mbar (N2) ±50% of reading

1×10-3 … 100 mbar (N2) ±15% of reading 

100 … 950 mbar ±5% of reading 

950 … 1050 mbar ±2.5% of reading 

Display

Digital display (20x14 mm) with measurement unit Torr 

Gauge Fitting

Small Foot-Print with KF16 port

Dimensions

46 mm×28 mm×126 mm (L x W x H)

Shipping Weight

5 lbs

Warranty

One year limited manufacturer warranty, please contact  vc.service.usa for information.

In the case of severe contamination or malfunction, the sensor can be replaced, please read the instruction for details. Replacement sensor is offered at $574/each)

Calibration

The pressure gauge is manufactured calibrated base on PTB / METAS (German / Swiss NIST) standards. Calibration data is available upon request.

Application Notes

General vacuum measurement and control in the Medium Vacuum Range (Range 1.0E-4 Torr to ATM).

Pirani gauges used in a clean environment can effectively operate above 5.0E-5 Torr range. 

If your tool requires effective reading in the 1.0E-5 Torr or lower, please select Pirani/Cold Cathode gauge with measurement range from 3.75E-9 to 760 Torr

Optional: M14 to KF16 adapter is needed for the use with MTI vacuum flanges, please click pic below to order replacement part

By connecting to a set of Solenoid Valves, this gauge can also be used with a pressure control system to keep the pressure constant in a vacuum system.

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