MS767的基础组成是硅微机加工膜和真空安装下的耐热玻璃。植入的电阻利用压阻效应感知膜的变形。MS767作为绝压传感器在膜下有密封真空参考腔。
由于传感器的基础元素是扩散电阻，地(GND1,GND2)上的电压必须低于电压脚（Vs+)上的电压。扩散层连接到Vs+。
MS767有个敏感膜（0.5x0.5mm)，传感器外直径是1.62x1.48mm。 吸取和放置工具应该为软材料如橡皮（硬度78-97 Shore A). 它的外部尺寸必须符合传感器。 真空腔要和膜一样大。
全压力范围
| kPa | bar | mbar | PSI | atm | mm Hg | m H2O | Inches H2O |
| 700 | 7 | 7000 | 102 | 6.9 | 5250 | 71 | 2810 |
比率
| 参数 | 符号 | 条件 | 最小 | | 单位 |
| 供应电压 | VS+ | Ta = 25℃ | | 20 | V |
| 存储温度 | Ts | | -40 | +150 | ℃ |
| 过压 | | | | 21 | Bar |
电气特性
(Reference conditions: Supply Voltage VS+ = 5 Vdc; Ambient Temperature Ta = 25℃ )
| 参数 | 最小 | 典型 | | 单位 | 备注 |
| 工作压力范围 | 0 | | 7 | Bar | |
| 工作温度范围 | -40 | | 125 | ℃ | |
| 桥路电阻 | 3.0 | 3.4 | 3.8 | KΩ | |
| Full-scale span (FS) | 322 | 392 | 462 | mV | |
| Zero Pressure Offset | -40 | 0 | 40 | mV | |
| 线性 | | ±0.15 | ±0.4 | % FS | 1 |
电阻温度系数 TCR 满量程温度系数 TCS 零点温度系数 TCO | + 2400 - 1500 - 80 | + 2800 - 1900 | + 3300 - 2300 + 80 | ppm/℃ ppm/℃ μV/℃ | 2 |
| 压力迟滞 | | ±0.05 | ±0.15 | % FS | 3 |
| 重复性 | | ±0.1 | ±0.2 | % FS | 4 |
| 温度迟滞 | | | 0.3 % | FS | 4 |
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range (0 to 7 bar).
2) Slope of the endpoint straight line from 25℃ to 60℃.
3) Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25℃.
4) Same as 3) after 10 pressure cycles
5) Maximum difference in offset after one thermal cycle from -40℃ to +125℃.
订购信息
| 产品 | 产品描述 | 编号 |
| MS767A-0.5 | 700 kPa Absolute Pressure Sensor with PyrexTM0.5 mm thick (standard) | |
| MS767A-0.2 | 700 kPa Absolute Pressure Sensor with PyrexTM0.2 mm thick | |
The MS767 dice are supplied sawn on blue foil, mounted on plastic rings
