EPRO传感器PR9268/017-100+前置器

EPRO传感器PR9268/017-100+前置器

EPRO传感器PR9268/017-100+前置器

 当PLC上电后，一直进行温度、压力、流量等运行参数的检测，这些检测主要在检测程序、故障程序和A/B组故障停机程序中完成。如果相关参数均无异常，则开机功能块子程序运行，启动压缩机。在开机过程中，同时进行温度判断。如果温度达到了设定值，则进入调节功能块子程序，停止开机功能块子程序，完成开机。根据温度的变化，调节功能块子程序控制压缩机的启停。变频器的控制则是通过调用加载程序和降载程序来实现。
 

Asyst 3200-1045-01

  MKS MKS-1459C-

MKS 1459C-00500RM

MKS MKS-1459C

MKS 1459C-00500RM

AMAT 0020-40066

MKS 1459C-01000RM

AMAT 0021-12764 Upper Shield, 8" SIP-TA, 327234

Unit UFC-8565 Mass Flow Controller MFC, C2H4, 5L, AMAT 3030-11781

STEC LF-310A-EVD Liquid Flow Controller LFC TEB 0.5g/min AMAT 3030-05744

STEC LF-310A-EVD Liquid Flow Controller LFC TEB 0.5g/min AMAT 3030-05744

STEC LF-410A-EVD Liquid Mass Flow Meter, LFC, TEOS, AMAT 3030-06043

STEC LF-310A-EVD

Vicor VI-26F-CU

Weigh-tronix WI-125, Class III/IIIL Scaleload, w/ Interface 1210AF-1K

Fanwall HG410025-PM-R

Fanwall CMS-32H R Filtering Fan Controller, HG410010-L

Leybold AG 200.80.976

Opto 22 AD9T

Infinicon CDG100 Capacitance Diaphragm Gauge PG62 10 Torr FL-9496 362-033 

Unit Instruments UFC-1100A

               Novellus 71-332298-00 Kit, Ship Along, Install, Door Purge, 451210

Oil-Rite Corporation Liquid Level Gauge, 451209

Asyst End Effector, Robot, 4003-2104-01, 451208

Asyst End Effector, Robot, 4003-2104-01, w/ Brooks 3200-4426-04

CTI Cryogenics 8081271

AMAT 0010-76697

SensArray 482-05-0002

AMAT 0140-76224

WSP-009 PCB, 7R 319021, 451199

AMAT 0140-70173

AMAT 0140-76223

AMAT 0190-35763

CTI Cryogenics 39108059

Novellus CA-63-33209-00

Novellus CA-63-33200-00

STEC SEC-4400

Novellus 63-33202-00

Novellus 63-33498-00

Yaskawa CACR-SR03AB2ER

Omega DP25-S-AR

AMAT 0010-21751 Resonator

West Bond 7200A

Ecosys 6324-01 Kit, PM GS8, 451187

AMAT 3750-01014

Kalrez AS-568A O-Ring, K#121

Kalrez AS-568A O-Ring, K#120

Kalrez AS-568A O-Ring K#202 

ABB S4N Circuit Breaker, SACES4, SACEPR211, AE03088627

Teach Pendant, Controller, Robot, 451177

MKS 153-1016K-24VDC

Entegris A192-81MLZ-0215

Swagelok SS-4-VCR-CP

Swagelok NI-4-VCR-2

AMAT 1220-01017 XMTR 2-Wire ORP 4-20MA-OUT

MKS LPV1-40-AK-CNVS 

MKS 99N0878 Right Angle Valve, 72-428642

Veriflo 45800345 Isolation Valve, 945A0PLPNCHF111?VESP, 451169

 Veriflo 45800345 Isolation Valve, 945A0PLPNCHF111?VESP, 451168

20176-00 Isolation Valve, Bellows, Pneumatic, 451167

Swagelok SS-4BK-V51-10

Ushio JCV120V-1200WC

11682-00 Isolation Valve, Bellows, Pneumatic, 451144

CP-40, KF40, Clamp, 451164

MKS HPS 100312703 Seal, Center Ring, NW25, AMAT 3700-01089

Brooks PRJ BM300290000

AMAT 0125-77072 IC113C

Tescom PV73A4K Valve, 451025

Tylan General CMLA-21S06

Mykrolis CMX2T1124

RF Plasma Products RFPP 23-07558-501 RF20 

AMAT 8100 Oxide Etcher w/ Pump Power Rack, 8100E, AME-8100, 451142

Fuji Electric EL90P0 Earth Leakage Protective Relay, AMAT 1200-01148

Quartz Viewport, Circular, 3 1/4" Diameter, 402336

Quartz Viewport, Circular, 3 1/4" Diameter, 402335

LAM 795-099665-001 Gate Bonded Slit Valve Door, Chemraz, VAT 96073-R1

Horiba STEC LV-F50PO

MKS 1159B-02000RV-S

STEC SEC-4400MC

Unit Instruments UFC-1660

AMAT 8100L, 8100X, 8100

Kaijo FB-118A Wire Bonder, FB 118A, FB 118A, 451153

Kaijo FB-118A Wire Bonder, FB 118A, FB 118A, 451152

Kulicke & Soffa 780 Wafer Dicing Saw with Manual, K&S, 451151

AMAT 0140-00533

Schuetz Messtechnik MR-1 Surface Resistance Meter, 451149

Kulicke & Soffa 982-6

Chemical Cabinet Drum Storage Unit, with Exhaust, 451145

Chemical Safety Technology Chemical Pump Delivery System, Master Flex, 451100

AMAT 0100-18043