EPRO PR6423/002-121 +CON041

 EPRO PR6423/002-121 +CON041

 EPRO PR6423/002-121 +CON041

 要提高现场输入给PLC信号的可靠性，首先要选择可靠性较高的变送器和各种开关，防止各种原因引起传送信号线短路、断路或接触不良。其次在程序设计时增加数字滤波程序，增加输入信号的可信性。

    在现场输入触点后加一定时器，定时时间根据触点抖动情况和系统要的响应速度确定，一般在几十ms，这样可保证触点确实稳定闭合后，才有其它响应。模拟信号滤波可采用图2b 程序设计方法，对现场模拟信号连续采样3次，采样间隔由A/D转换速度和该模拟信号变化速率决定。3次采样数据分别存放在数据寄存器DT10、DT11、DT12中，当后1次采样结束后利用数据比较、数据交换指令、数据段比较指令去掉大和小值，保留中间值作为本次采样结果存放在数据寄存器DT0中。

KITZ SCT PNEUMATIC DOUBLE ACTION VALVE SQ106-034 UXG1205H-KL-113 

BOC EDWARDS VACUUM FLASH MODULE D37215020

APPLIED MATERIALS AMAT 0140-21383 

APPLIED MATERIALS AMAT ENDURA SUBZERO LIFT PINCH GUARD KIT 

TOKYO ELECTRON LIMITED EPION CHAMBER CROSSING BROOKS AUTOMATION VAT 02112-BA24

Mykrolis Millipore WGFG06WC1 

SWAGELOK SS-810-1-8RTCP 

TOKYO ELECTRON SAN ACE SANYO DENKI FAN 109L1724V5K03 MB 3M80-003171-1191776

APPLIED MATERIALS AMAT 0150-70002

UNIT INSTRUMENTS MASS FLOW CONTROLLER UF-8165 

HARMONIC DRIVE YASKAWA AC SERVO MOTOR SGMSV-50DPA-YA11 5KW CNC 7333795160 SPA-90

CKD AGD11V-AT2-4R 

FUJIKIN FPR-SDBT-21-6.35-APY#A

PARKER VERIFLO MINI SS REGULATOR SMSQ2MICRO130E60102 45800978-2

APPLIED MATERIALS AMAT SCREW SKT CAP HD ASZ/P M6X10LG 3690-90154 

LAM RESEARCH 796-093055-001 

HP Agilent 6651A

LEYBOLD INFICON 908-148-G1 

TOKYO ELECTRON TEL CT5044-000450-15 TKB7621

TOKYO ELECTRON TEL FURNACE P TRAP VAT VALVE 26434-KA231 26534-XA21 3M87-0632621C

APPLIED MATERIALS AMAT MIRRA 3400 

APP MAT AMAT MOHAWK CABLE ASSY ECAT CHB OUT FDP CHC IN TAHOE 

APP MAT AMAT MOHAWK CABLE ASSY ECAT CHC OUT FDP CHC IN TAHOE

TOKYO ELECTRON BELLOWS COVER 1D10-200734-W1

AERA MASS FLOW CONTROLLER MFC TC-D985CT-BH D-985 200SCCM CHF3

APP MAT AMAT MOHAWK CABLE ASSY ECAT CHA OUT TO CH2C OUT TAHOE 0150-28167

APPLIED MATERIALS AMAT CABLE E-SW TO CH 2C DAQ PROD GT-DC 0150-29229

LAM RESEARCH 716-020931-030

LAM RESEARCH RETAINER CLAMP WASHER 716-011571-001 

SONY CMA-D2

APPLIED MATERIALS AMAT M6X12 BUTTON HD SOCKET SCREW 3690-91016 

TOKYO ELECTRON P8XL P8 PROBER D204 

APTECH REGULATOR 809-602620 MAX INLET 2PWMV4MV4 100PSI AP1410SM

TRENTON SBC SINGLE BOARD COMPUTER 3.6GHz 4GB 92-506313-XXX

WEIR SHS 100/24

Kokusai Furnace Shutter Disk 4QDK26091B T1-DC3-00284 DJ803 DJ803

TOKYO ELECTRON TEL VRA2000-8-100

NIKON PRECISION SMC SOLENOID V0301 VALVE I10 

ASAHI KEIKI AS-203A-1V-3

Millipore Microgard Mini-Chem D Filter CWUZ0S0S1 

TOKYO ELECTRON CT024-023088-01 VACUUM FILTER SMC SFD200-02

TOKYO ELECTRON TEL DS04-020206-1 CKD CYLINDER SCDP2-1644 

APPLIED MATERIALS AMAT SCR CAP SKT HD8-32X318L HEX SKT 

APPLIED MATERIALS AMAT PRECLEAN BELL JAR 

TREBOR MEGA 950 

APPLIED MATERIALS AMAT WASHER 3/16X3/4 OD ZP STL 

EDWARDS APPLIED MATERIALS AMAT IPUP 2 ASSEMBLY-IPUP2 A54057000

ThreeBond 1110B 

APPLIED MATERIALS AMAT DPS CENTURA RASCO CHILLER HEAT EXCH WTC-A182-AMJ

CKD VALVE AB41-03-5

TOKYO ELECTRON TEL UBRPD5A-1T3 CHILLER 3M80-00181-11 

UNITS TAS SERIES 2 TELEPHONE NETWORK EMULATOR 1200D 240 TAS 3508A

APPLIED MATERIALS AMAT 0150-04852 NMB-MAT 4710KL-05W-B50 

VAT VALVE UHV PNEUMATIC GATE VALVE 10848-UE24-BFL1/003

AMAT 0680-01605 

APPLIED MATERIALS AMAT DPS CENTURA RASCO CHILLER HEAT EXCH WTC-D182-AMJ

MR-RB12 TOKYO ELECTRON TEL MOTOR DRIVE UNIT CT040-002640-1 

AMETEK ROTRON HEAT EXCHANGER 

SMC CDQ2B32-20D AIR CYLINDER 145PSI 

TOKYO ELECTRON SHIMADZU TURBO MOLECULAR PUMP TMP-3403LMC-T4 ES3D80-0094811K11

HMI 77-603-430100-000 

FUJIKIN STAINLESS STEEL 90° MALE CONNECTO 1/4" NPT F900-L-9.52 

APPLIED MATERIALS AMAT 0021-35065 

SMC TEL COMPACT PNEUMATIC AIR CYLINDER ACTUATOR CQ2B32-10D 024-018673

TOKYO ELECTRON TEL HEATER ELEMENT CARBON QUARTZ THERMOCOUPLE VD5143-000023-11

2533-000008 ULTRATECH STEPPER 1500 B2DX281

TOKYO ELECTRON TEL ALPHA 85E HEATER ELEMENT 5 ZONE 8" VMM-56-002

Loctite 263 

APPLIED MATERIALS LOADLOCK 0190-37105 AXIOM CONDOR VAT VALVE 0430X-BA24 

FUJIKIN FPR-SDAT-21-6.35-APY 

APPLIED MATERIALS AMAT 0150-21254 

FUJIKIN FPR-SDB-21-6.35-APY#A 

TEAL POWER CONDITIONER 6 PORT INPUT 480V 4400023

NEMIC LAMBA TDK PS-1210 

TOKYO ELECTRON P8 P8XL 

PROMETRIX TENCOR UV1050 TEAL ELECTRONICS POWER SUPPLY CONDITIONER 7AQ100R 

FUJIKIN STAINLESS STEEL 90° MALE CONNECTO 1/4" NPT F900-L-9.52

KARL SUSS MA150 BANNER ENGINEERING AP100-C3 SP100 

LAMBDA MBS-1320-33 

ADVANCED THERMAL SCIENCES ATS BE AEROSPACE CHILLER MP-20Y-GL

TOKYO ELECTRON TEL CS046-000660-1