6ES5300-5AA12*
6ES5300-5AA12*
经验法编程
经验法是运用自己的或别人的经验进行设计。多数是设计前先选择与自己工艺要求相近的程序，把这些程序看成是自己的“试验程序"。结合自己工程的情况，对这些“试验程序"逐一修改，使之适合自己的工程要求。这里所说的经验，有的是来自自己的经验总结，有的可能是别人的设计经验，就需要日积月累，善于总结。
3. 计算机辅助设计编程
计算机辅助设计是通过 PLC 编程软件在计算机上进行程序设计、离线或在线编程、离线仿真和在线调试等等。使用编程软件可以十分方便地在计算机上离线或在线编程、在线调试，使用编程软件可以十分方便地在计算机上进行程序的存取、加密以及形成 EXE 运行文件。
7.3.2 PLC 软件系统设计的步骤
在了解了程序结构和编程方法的基础上，就要实际地编写 PLC 程序了。编写 PLC 程序和编写其他计算机程序一样，都需要经历如下过程。
1. 对系统任务分块
分块的目的就是把一个复杂的工程，分解成多个比较简单的小任务。这样就把一个复杂的大问题化为多个简单的小问题。这样可便于编制程序。
2. 编制控制系统的逻辑关系图
从逻辑关系图上，可以反应出某一逻辑关系的结果是什么，这一结果又英国导出哪些动作。这个逻辑关系可以是以各个控制活动顺序为基准，也可能是以整个活动的时间节拍为基准。逻辑关系图反映了控制过程中控制作用与被控对象的活动，也反应了输入与输出的关系。
AMAT 0200-00025, Gas Ring 8 XTAL
100 new 0060-02136 label, 0-300ML, scale, 5.8275" L X 1/2"
AMAT 0020-78894 inner clamp 6" titan-2
AMAT 0010-21020 Magnet Assymbeley Modified Dura Source
AMAT 0010-09049 Assembly Storage Elevator, 0020-09297
AMAT 0020-76180 Endura Centura Cool Down Chamber
NEW AMAT 0100-91077 PWBA ANALYSING MAGNET AMPLIFIER
NEW AMAT 0200-10555 Baseplate, With Baffle Quartz
AMAT 0400-81155 DPS Chamber liner, Tetra, Photomask
AMAT 0010-20860 Magnet Assymbeley Hollow Pole Piece
AMAT 0020-20157 Magnet Assy TYPE A 11.30"
AMAT 0100-90273 PWB ASSY SPIN SCAN MOTHERBOARD
AMAT 0020-10753, Plate Pumping, 8 inch, CVD Chamber
196 AMAT 0630-01313 CAP FIX 35V 10UF 20% AL ELECT 2MMLS RA
AMAT 0010-20159 Assy 5" Heater VCR w/TC 5500
AMAT 0040-01066 Enclosure, Lid Wafer Sensor Module
AMAT 0010-37176 ESC Assembly, Chuck, 300 MM , DPS AE Etch Chamber
AMAT 0010-70252 Assy 6" Heater VCR w/2TC's 5500
3 new AMAT 3310-01139 pressure gauge 0-160PSI 2"D 1/8 NPT CTR-BK
3 new AMAT 0150-35807cable assy., 15 PIN MFC RTP TOXIC SYSTEM
8 AMAT 0020-19875 Screw Cap/Vent PH 10-32 Faceplate ALD - TI
NEW AMAT 0200-00470 PAD, FRONT RIGHT, BLADE, UNIVERSAL, 200mm
AMAT 0010-00135 60V Power Supply, SN 353505
2 AMAT 0020-32034, Vespel Clamp Ring
AMAT 0040-49438, Adapter Plate, RF Match
NEW AMAT 0040-37606 Gas Manifold, CVD AL
AMAT 0021-17902 Spacer, Upper Door Rail, +/- 15
2 Omron RF tag reader V700-HMD13A, AMAT 0190-10957, ID reader/writer
Set of 12 AMAT 0150-70023 Cable Feeder Wires TB1
AMAT 0020-22814, Clamping Ring 5" AL SMF
AMAT 0020-07049 Support, Seal
AMAT 0020-79485 Bearing Clamp
10 varian 04764001 plate resistor
AMAT 0140-04132 Harness Assy, Robot Controller Power, 300mm
AMAT 0190-32506 Flow Sensor, LFU-20, Ultra Sonic 1-1600 ML/Min
AMAT 0090-01014 Convenience Outlet Assembly
NEW AMAT 0040-00595 Process rough line, lower seiko seiki
AMAT 0150-13082 CABLE ASSY, COAX, 25FT
AMAT 0100-00199 PC BOARD ASSEMBLY, END EFFECTOR SERVO CO
AMAT 0090-91010 Inductor Sub Assy, 0090-91010-D
AMAT 0010-40239 Spare ESC Power Supply
AMAT 0240-14889 Kit, Outrigger Leveling Tools
AMAT 0150-03257 CABLE ASSY OPERATOR INTF 25 FT ENDURA PVD
AMAT 0020-39413 Floor Cover, Rear Right, W/ APC Position
AMAT 0150-16023 C/A, RF Generator DC Power Interconnect
AMAT 0150-02133 CABLE ASSY 100FT, EMO, HIGH CAPACITY HX
AMAT 0020-25041 clamp ring 6" smf strd edge tin
NEW AMAT 0021-14199 Cover, Upper Chamber, 300MM DPS II
AMAT 0150-75038 Cable Assembly, 75 FT, MFC TO 5000 SYS OZONAT
AMAT 0190-70060, Magnet Driver, Kollmorgen, Magnedyne, 1100-0051-00, 395544
AMAT 0150-40159 Cable Assy Remote Chamber Interface 75 Ft, Assembly, 399459
AMAT 0020-27125 PEDESTAL, PCII 8" Preclean chamber, SNNF--AL MATL
AMAT 1400-01396 SENSOR DIGITAL READHEAD 5UM RGH22 SERIES, RGH22/24/25 RENISHAW
AMAT 0021-12764 Upper Shield, 8" SIP-TA
AMAT 0020-41147 Ring, Roof & Dome Cooling SSO
AMAT 0020-25709 CLAMP RING 8" TIN SNNF
AMAT 0200-18023 Dome, Barrier Up- Chamber HDPCVD
AMAT 0190-14027 W Board Wafer Flat Finder
AMAT 0010-18012 Assy RF Relay Lid HDPCVD
AMAT 0100-00621 PCB Assembly 24V Power Display 4W Wafer
AMAT 0040-45104, Arm Hinge ECP Ann
AMAT 1400-01388 Sensor Proximity 5MM PNP SPDT-NO/NC 10-30
AMAT 0010-05210 Assy, N2 Purge, Unit, 200MM Radiance, 3030-07103 UNIT 1660 MFM
AMAT 0227-45235 SMC CRB80-180 Cassette Handler Bot P5000
AMAT 0200-00673 Cover Ring 8in. IMF/BESC AL ARC SPRAY
AMAT 0140-08132 HARNESS ASSEMBLY PRODUCER E RIGHT CHAMBE
2 new AMAT 0021-02200 Manifold Port, KF 25, Microwave, 200 mm, St
AMAT 3070-01047 Shield Bellows
AMAT 0200-05635- Tetra used, ceramic, lid, photomask tetra II, 300mm
APPLIED MATERIALS AMAT 0010-20806 EQ MAGNET ASSY, AMAT 0020-24562
2 New, AMAT 0150-03730 cable assy. RF rack intergrated system, RTP
MKS Astex AX7650 ASTRON ATOMIC FLOURINE GENERATOR, AMAT 0920-01120 OEM BOX,
AMAT 3880-05671, SMC AxT1028-29A, Valve, Mixing, PFA4647
AMAT 3870-05451 Valve, Ball, Manual, NW-50, Kalrez 4079 Stem Seal
AMAT 0040-81156, Metron AI Upper Chamber Liner, Photomask, 30056500-465-013
AMAT 1410-00427 HTR CRTG 1/4ODX3"LG 250W 240V 1/8NPT 50"
AMAT 0140-07289 Malema M-60-T32-01-001spray bar chem #1 flow sensor harness
2 Setra 223G025PABW2CD1M, AMAT 1350-00492 Pressure Transducer, 4VCR, 25, PSIA
Novellus, ISO100 Vacuum Tube 15" long w/ KF25, KF16 & VCR Flange, 10-338185-00/1
AMAT 0242-00532, DC WAFER ON BLADE SENSOR 0040-01066, 0040-01097, 0400-01098,
AMAT 0010-70252 6" Heater Assy with 2 T.C., 0065-BLF, 395377
AMAT 0021-10911 Support Cassette Special Corrosion
10 AMAT 0720-01203 Conn, Plug 4 Pole 5 Wire
NEW AMAT 0090-93111 ASSY 24V 65W XP PSU, Power supply
AMAT 1270-00381 SW Assy ST3, 4 Mapping Interlock 200MM FA
9 AMAT 1230-01246 SKT MED BI-PIN LAMP BUTT-ON TURN LOCK
AMAT 0040-02411 Adaptor Spindle Spinning Head EPC
AMAT 0021-11863 Cover Ring 8", 101 TIN TTN CH POS 2& 3
AMAT 3030-01619 x/LFC Liquid Flow Meter, Teos, 1GM/MIN SIDE
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398301
NEW AMAT 0020-26115 CLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398300
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398276
NEW AMAT 0020-26115 PACLAMP RING, 8 INCH, DEGAS, IT, CP, ENDURA, 398316
Sequoia-Turner Chopper Drive P.C.B ASM # 9600424
8 NEW AMAT 3690-02239 SCR CAP SKT HD 1/4-20 x 1" HEX SKT SST SLVR PLT
AMAT 4020-01133 INLINE FILTER GAS 1/2VCR 100SLM
