SKY® CDG025D-X3 4-20mA current loop 0.1 ... 1000 托 / 毫巴过程压力真空计
INFICON SKY CDG025D 电容膜片真空计属于高精度温度补偿型真空计，在苛刻的生产环境中具有稳定的性能。 的数字电子设备提高真空计的性能和易于使用的特点，如一键调零功能和设定点调整。 抗腐蚀性的超纯陶瓷传感器具有的零点稳定性和预计数百万次压强周期（包括大气冲击）的长使用寿命。 的传感器屏蔽（申请中）保护真空计免受过程污染。 坚固耐用的机械设计和数字电子设备改善了 EMC 兼容性、长期稳定性和温度补偿。 CDG025D 为电源接通后的快速稳定与暴露大气压后的快速恢复等特性设定了新标准。
益处
全刻度范围从 100 毫托 … 1000 托
电源接通后快速稳定
暴露于大气压后快速恢复
防腐陶瓷传感器
的长期信号稳定性
温度补偿
传感器防污染双层保护
一键调零功能
电源范围广
2 个设定点
RS232 接口
Remote zero included
符合洁净室标准
Status LED
典型应用
用于刻蚀、CVD、PVD、ALD 的半导体生产设备
数据存储和显示制造设备
工业真空设备
常规高精度压力测量
规格
| 类型 | 1000 Torr / 1100 mbar | 500 ... 10 Torr / mbar | 1 Torr / mbar | 0.25 Torr | 0.1 Torr / mbar | |
|---|---|---|---|---|---|---|
| 精度 (1) | % of reading | 0.2 | 0.2 | 0.2 | 0.25 | 0.5 |
| 温度效应 | ||||||
| 零点 | percent FS/°C | 0.005 | 0.005 | 0.015 | 0.02 | 0.02 |
| 满量程 | % of reading / °C | 0.01 | 0.01 | 0.01 | 0.03 | 0.03 |
| 分辨率 | percent FS | 0.003 | 0.003 | 0.003 | 0.003 | 0.003 |
| 压力，Z大 | kPa (absolute) | 300 | 200 | 200 | 200 | 130 |
| 反应时间 (2) | ms | ≤100 | ≤100 | ≤100 | ≤100 | ≤100 |
| Z低读数 | percent FS | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 |
| 建议的Z低读数 | percent FS | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
| 建议的Z低控制压力 | percent FS | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 |
| 温度 | ||||||
| 运行（环境） | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
| 在法兰处烘烤 (4) | °C | ≤110 | ≤110 | ≤110 | ≤110 | ≤110 |
| 贮存 | °C | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 |
| 电源电压 | V (dc) | +21 … +27 | +21 … +27 | +21 … +27 | +21 … +27 | +21 … +27 |
| 76b34a4a-4e29-4c2f-b9f5-f7c162f44101 | ||||||
| 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | ||
| Signal range | mA | 3.8 ... 20.2 | 3.8 ... 20.2 | 3.8 ... 20.2 | 3.8 ... 20.2 | 3.8 ... 20.2 |
| Measuring range (zero ...FS) | mA | 4.0 ... 20.0 | 4.0 ... 20.0 | 4.0 ... 20.0 | 4.0 ... 20.0 | 4.0 ... 20.0 |
| Relationship current-pressure | linear | linear | linear | linear | linear | |
| Loaded impedance RL | ||||||
| 33b4d39f-dcb0-4da6-b8bb-405bbe6e5695 | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | |
| absolute | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | |
| absolute | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | |
| absolute | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | |
| remote zero input | ||||||
| 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | 2-wire, current loop | ||
| High level | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | |
| Low level | V (dc) | ≤2 | ||||
| Remote zero function | ||||||
| High level (pulse >1s) | auto zero adjust | auto zero adjust | auto zero adjust | auto zero adjust | auto zero adjust | |
| Low level | measurement operation | measurement operation | measurement operation | measurement operation | ||
| 保护等级 | IP 30 | IP 30 | IP 30 | IP 30 | IP 30 | |
| 标准 | ||||||
| CE 合规 | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | |
| ETL 认证 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| 电气连接 | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
| Sensor cable | ||||||
| Without remote zero | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | |
| With remote zero | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | |
| 暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | |
| 内部容积 | ||||||
| 内部容积 1/2'' 管 | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| 内部容积 DN 16 ISO KF | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| 内部容积 DN 16 CF-R | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| 内部容积 8 VCR® | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| 重量 | ||||||
| 重量 1/2'' 管 | g | 310 | 310 | 310 | 310 | 310 |
| 重量 DN 16 ISO KF | g | 330 | 330 | 330 | 330 | 330 |
| 重量 DN 16 CF-R | g | 350 | 350 | 350 | 350 | 350 |
| 重量 8 VCR® | g | 370 | 370 | 370 | 370 | 370 |
(1) 25 °C 环境温度时非线性、滞后、可重复，运行 2 小时后不产生温度效应。
(2) 增加 10 ...90 % FS
(3) 仅适用于压力控制类型
(4) 非运行
(5) 18% 铬、10% 镍、3% 钼、69% 铁
零件号
