thyrcont图拉特真空计VSI17E
VSI17E Vacuum Transducer ● DN25KF ● EtherCAT
The digital cold cathode transducer VSI with EtherCAT interface measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.
描述
Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Easily replaceable sensor heads with stored calibration data
Digital RS485 interface and EtherCAT
应用
Coating plants and vapor deposition
Industrial furnaces
Process engineering
Analytical instruments
Sputtering plants
Measuring and controlling in high vacuum
技术参数
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASUREMENT RANGE | 2e-3 – 5e-9 mbar (Torr), max. overpressure 10 bar abs. |
| ACCURACY | 2e-3 mbar – 2e-8 mbar: < 25% from reading |
| CATHODE VOLTAGE | Max. 2,5 kV |
| ELECTRICAL CONNECTION | M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16, EtherCAT |
| SWITCH POINT | not available |
| VACUUM CONNECTION | DN 25 ISO-KF |
| PROTECTION CLASS | IP54 |
vsie.pdf
man_vsi-de-171005.pdf
